Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling

Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. === Includes bibliographical references (leaves 104-106). === by Roy L. Rasera. === M.S.

Bibliographic Details
Main Author: Rasera, Roy L. (Roy Louis)
Other Authors: Joseph B. Bernstein.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2006
Subjects:
Materials Science and Engineering
Online Access:http://hdl.handle.net/1721.1/32180

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