Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. === Includes bibliographical references (leaves 104-106). === by Roy L. Rasera. === M.S.

Bibliographic Details
Main Author:	Rasera, Roy L. (Roy Louis)
Other Authors:	Joseph B. Bernstein.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2006
Subjects:	Materials Science and Engineering
Online Access:	http://hdl.handle.net/1721.1/32180

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spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-321802019-05-02T16:29:08Z Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling Rasera, Roy L. (Roy Louis) Joseph B. Bernstein. Massachusetts Institute of Technology. Dept. of Materials Science and Engineering Materials Science and Engineering Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. Includes bibliographical references (leaves 104-106). by Roy L. Rasera. M.S. 2006-03-29T18:22:02Z 2006-03-29T18:22:02Z 1995 1995 Thesis http://hdl.handle.net/1721.1/32180 34311938 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 106 leaves 6432981 bytes 6438915 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Materials Science and Engineering
spellingShingle	Materials Science and Engineering Rasera, Roy L. (Roy Louis) Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 1995. === Includes bibliographical references (leaves 104-106). === by Roy L. Rasera. === M.S.
author2	Joseph B. Bernstein.
author_facet	Joseph B. Bernstein. Rasera, Roy L. (Roy Louis)
author	Rasera, Roy L. (Roy Louis)
author_sort	Rasera, Roy L. (Roy Louis)
title	Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
title_short	Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
title_full	Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
title_fullStr	Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
title_full_unstemmed	Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
title_sort	laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling
publisher	Massachusetts Institute of Technology
publishDate	2006
url	http://hdl.handle.net/1721.1/32180
work_keys_str_mv	AT raseraroylroylouis laserlinkingofmetalinterconnectprocessconsiderationsandfailureanalysisusingfocusedionbeammilling
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Laser linking of metal interconnect : process considerations and failure analysis using focused ion beam milling

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