Force multiplier in a microelectromechanical silicon oscillating accelerometer
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 2000. === Includes bibliographical references (leaves 89-90). === This thesis describes the third generation design of a silicon oscillating accelerometer (SOA.) The device is a micromachined vibrating beam accele...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/31084 |