Engineered substrates for coplanar integration of lattice-mismatched semiconductors with silicon
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, 2005. === Includes bibliographical references (p. 203-208). === As we approach the end of traditional CMOS scaling, further improvements in integrated circuit performance and functionality will become...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/30253 |