Sputtered silicon oxynitride for microphotonics : a materials study
Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Materials Science and Engineering, February 2005. === Includes bibliographical references (leaves 121-134). === Silicon oxynitride (SiON) is an ideal waveguide material because the SiON materials system provides substantial flexibility...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2006
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| Online Access: | http://hdl.handle.net/1721.1/30250 |