The development of a prototype Zone-Plate-Array Lithography (ZPAL) system

• Main Author: Patel, Amil Ashok, 1979-
• Other Authors: Henry I. Smith.
• Format: Others
• Language: English
• Published: Massachusetts Institute of Technology 2005
• Subjects: Electrical Engineering and Computer Science.
• Online Access: http://hdl.handle.net/1721.1/18054

Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 2004. === Includes bibliographical references (p. 75-77). === The research presented in this paper aims to build a Zone-Plate-Array Lithography (ZPAL) prototype tool that will demonstrate the high-resolution, parallel patterning capabilities of the architecture. The experiment will require the integration of micromechanical spatial light modulators with an existing zone-plate-array testbed lithography tool. The system development requires an efficient data-delivery system to promote throughput and a thoughtful optical channel to optimize the lithographic performance of zone-plates. Lithography results obtained from the prototype will be presented along with basic performance characteristics. === by Amil Ashok Patel. === S.M.