Design of a silicon carbide micro-hotplate geometry for high temperature chemical sensing
Thesis (S.M.)--Massachusetts Institute of Technology, Dept. of Aeronautics and Astronautics, 2001. === Includes bibliographical references (p. 127-129). === Silicon carbide, high temperature, chemical sensors are the next step in chemical detection technology; allowing for the development of low cos...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2005
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/17535 |