Modeling, optimization, and control of spatial uniformity in manufacturing processes

Modeling, optimization, and control of spatial uniformity in manufacturing processes

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1991. === Includes bibliographical references (leaves 105-109). === by Ruey-Shan Guo. === Ph.D.

Bibliographic Details
Main Author: Guo, Ruey-Shan
Other Authors: Emanuel Sachs.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/13459

Internet

http://hdl.handle.net/1721.1/13459

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