Chemical vapor deposition of functional and conformal polymer thin films for the formation and modification of nanostructures
Thesis: Ph. D., Massachusetts Institute of Technology, Department of Materials Science and Engineering, 2018. === Cataloged from PDF version of thesis. === Includes bibliographical references. === Autonomous mini- and microscale devices require the miniaturization of component devices such as on boa...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | English |
| Published: |
Massachusetts Institute of Technology
2018
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1721.1/117934 |