Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. === Includes bibliographical references (leaves 263-274). === by Scott D. Hector. === Ph.D.

Bibliographic Details
Main Author:	Hector, Scott D. (Scott Daniel)
Other Authors:	Henry I. Smith.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/11617

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spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-116172019-05-02T16:25:07Z Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments Hector, Scott D. (Scott Daniel) Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. Includes bibliographical references (leaves 263-274). by Scott D. Hector. Ph.D. 2005-08-16T23:03:03Z 2005-08-16T23:03:03Z 1994 1994 Thesis http://hdl.handle.net/1721.1/11617 32052989 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 274 leaves 21256978 bytes 21256732 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science
spellingShingle	Electrical Engineering and Computer Science Hector, Scott D. (Scott Daniel) Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
description	Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1994. === Includes bibliographical references (leaves 263-274). === by Scott D. Hector. === Ph.D.
author2	Henry I. Smith.
author_facet	Henry I. Smith. Hector, Scott D. (Scott Daniel)
author	Hector, Scott D. (Scott Daniel)
author_sort	Hector, Scott D. (Scott Daniel)
title	Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
title_short	Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
title_full	Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
title_fullStr	Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
title_full_unstemmed	Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments
title_sort	optimization of image formation in x-ray lithography using rigorous electromagnetic theory and experiments
publisher	Massachusetts Institute of Technology
publishDate	2005
url	http://hdl.handle.net/1721.1/11617
work_keys_str_mv	AT hectorscottdscottdaniel optimizationofimageformationinxraylithographyusingrigorouselectromagnetictheoryandexperiments
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Optimization of image formation in X-ray lithography using rigorous electromagnetic theory and experiments

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