A new modeling methodology combining engineering and statistical modeling methods : a semiconductor manufacturing application

A new modeling methodology combining engineering and statistical modeling methods : a semiconductor manufacturing application

Thesis (Sc. D.)--Massachusetts Institute of Technology, Dept. of Mechanical Engineering, 1996. === Includes bibliographical references (leaves 120-125). === by Vikas Sharma. === Sc.D.

Bibliographic Details
Main Author: Sharma, Vikas
Other Authors: Roy E Welsch, Steven D. Eppinger.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Mechanical Engineering
Online Access:http://hdl.handle.net/1721.1/10686

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