Plasma oxidation of silicon : kinetics studies
Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. === MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. === Includes bibliographical references. === by David Tai Wai Chan. === M.S.
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2016
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| Online Access: | http://hdl.handle.net/1721.1/105010 |