Plasma oxidation of silicon : kinetics studies

Plasma oxidation of silicon : kinetics studies

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. === MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. === Includes bibliographical references. === by David Tai Wai Chan. === M.S.

Bibliographic Details
Main Author: Chan, David Tai Wai
Other Authors: L.R. Reif.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2016
Subjects:
Electrical Engineering and Computer Science.
Online Access:http://hdl.handle.net/1721.1/105010
id ndltd-MIT-oai-dspace.mit.edu-1721.1-105010
record_format oai_dc
spelling ndltd-MIT-oai-dspace.mit.edu-1721.1-1050102019-05-02T16:12:24Z Plasma oxidation of silicon : kinetics studies Chan, David Tai Wai L.R. Reif. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Massachusetts Institute of Technology. Department of Electrical Engineering and Computer Science. Electrical Engineering and Computer Science. Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. Includes bibliographical references. by David Tai Wai Chan. M.S. 2016-10-25T19:49:11Z 2016-10-25T19:49:11Z 1984 1984 Thesis http://hdl.handle.net/1721.1/105010 11904716 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 106 leaves application/pdf Massachusetts Institute of Technology
collection NDLTD
language English
format Others
sources NDLTD
topic Electrical Engineering and Computer Science.
spellingShingle Electrical Engineering and Computer Science.
Chan, David Tai Wai
Plasma oxidation of silicon : kinetics studies
description Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1984. === MICROFICHE COPY AVAILABLE IN ARCHIVES AND ENGINEERING. === Includes bibliographical references. === by David Tai Wai Chan. === M.S.
author2 L.R. Reif.
author_facet L.R. Reif.
Chan, David Tai Wai
author Chan, David Tai Wai
author_sort Chan, David Tai Wai
title Plasma oxidation of silicon : kinetics studies
title_short Plasma oxidation of silicon : kinetics studies
title_full Plasma oxidation of silicon : kinetics studies
title_fullStr Plasma oxidation of silicon : kinetics studies
title_full_unstemmed Plasma oxidation of silicon : kinetics studies
title_sort plasma oxidation of silicon : kinetics studies
publisher Massachusetts Institute of Technology
publishDate 2016
url http://hdl.handle.net/1721.1/105010
work_keys_str_mv AT chandavidtaiwai plasmaoxidationofsiliconkineticsstudies
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