Fabrication of extremely smooth nanostructures using anisotropic etching

Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. === Includes bibliographical references. === by Andrea Elke Franke. === M.S.

Bibliographic Details
Main Author:	Franke, Andrea Elke
Other Authors:	Henry I. Smith.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/10459

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record_format	oai_dc
spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-104592019-05-02T15:36:03Z Fabrication of extremely smooth nanostructures using anisotropic etching Franke, Andrea Elke Henry I. Smith. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references. by Andrea Elke Franke. M.S. 2005-08-18T20:50:24Z 2005-08-18T20:50:24Z 1997 1997 Thesis http://hdl.handle.net/1721.1/10459 37658985 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 70 leaves 6599953 bytes 6599711 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science
spellingShingle	Electrical Engineering and Computer Science Franke, Andrea Elke Fabrication of extremely smooth nanostructures using anisotropic etching
description	Thesis (M.S.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. === Includes bibliographical references. === by Andrea Elke Franke. === M.S.
author2	Henry I. Smith.
author_facet	Henry I. Smith. Franke, Andrea Elke
author	Franke, Andrea Elke
author_sort	Franke, Andrea Elke
title	Fabrication of extremely smooth nanostructures using anisotropic etching
title_short	Fabrication of extremely smooth nanostructures using anisotropic etching
title_full	Fabrication of extremely smooth nanostructures using anisotropic etching
title_fullStr	Fabrication of extremely smooth nanostructures using anisotropic etching
title_full_unstemmed	Fabrication of extremely smooth nanostructures using anisotropic etching
title_sort	fabrication of extremely smooth nanostructures using anisotropic etching
publisher	Massachusetts Institute of Technology
publishDate	2005
url	http://hdl.handle.net/1721.1/10459
work_keys_str_mv	AT frankeandreaelke fabricationofextremelysmoothnanostructuresusinganisotropicetching
_version_	1719024665329926144

Fabrication of extremely smooth nanostructures using anisotropic etching

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