Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)

Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. === Includes bibliographical references (leaves 59-64). === by Raj K. Gupta. === Ph.D.

Bibliographic Details
Main Author: Gupta, Raj K., Ph. D. 1969-
Other Authors: Stephen D. Senturia.
Format: Others
Language:English
Published: Massachusetts Institute of Technology 2005
Subjects:
Electrical Engineering and Computer Science
Online Access:http://hdl.handle.net/1721.1/10454

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