Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)

Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. === Includes bibliographical references (leaves 59-64). === by Raj K. Gupta. === Ph.D.

Bibliographic Details
Main Author:	Gupta, Raj K., Ph. D. 1969-
Other Authors:	Stephen D. Senturia.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2005
Subjects:	Electrical Engineering and Computer Science
Online Access:	http://hdl.handle.net/1721.1/10454

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spelling	ndltd-MIT-oai-dspace.mit.edu-1721.1-104542019-05-02T15:49:03Z Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS) Gupta, Raj K., Ph. D. 1969- Stephen D. Senturia. Massachusetts Institute of Technology. Dept. of Electrical Engineering and Computer Science Electrical Engineering and Computer Science Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. Includes bibliographical references (leaves 59-64). by Raj K. Gupta. Ph.D. 2005-08-18T20:47:37Z 2005-08-18T20:47:37Z 1997 1997 Thesis http://hdl.handle.net/1721.1/10454 37658953 eng M.I.T. theses are protected by copyright. They may be viewed from this source for any purpose, but reproduction or distribution in any format is prohibited without written permission. See provided URL for inquiries about permission. http://dspace.mit.edu/handle/1721.1/7582 68 leaves 6484705 bytes 6484465 bytes application/pdf application/pdf application/pdf Massachusetts Institute of Technology
collection	NDLTD
language	English
format	Others
sources	NDLTD
topic	Electrical Engineering and Computer Science
spellingShingle	Electrical Engineering and Computer Science Gupta, Raj K., Ph. D. 1969- Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
description	Thesis (Ph. D.)--Massachusetts Institute of Technology, Dept. of Electrical Engineering and Computer Science, 1997. === Includes bibliographical references (leaves 59-64). === by Raj K. Gupta. === Ph.D.
author2	Stephen D. Senturia.
author_facet	Stephen D. Senturia. Gupta, Raj K., Ph. D. 1969-
author	Gupta, Raj K., Ph. D. 1969-
author_sort	Gupta, Raj K., Ph. D. 1969-
title	Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
title_short	Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
title_full	Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
title_fullStr	Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
title_full_unstemmed	Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)
title_sort	electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (mems)
publisher	Massachusetts Institute of Technology
publishDate	2005
url	http://hdl.handle.net/1721.1/10454
work_keys_str_mv	AT guptarajkphd1969 electrostaticpullinteststructuredesignforinsitumechanicalpropertymeasurementsofmicroelectromechanicalsystemsmems
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Electrostatic pull-in test structure design for in-situ mechanical property measurements of microelectromechanical systems (MEMS)

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