Doubling of block copolymer line patterns by electron-beam-fabricated templates

Doubling of block copolymer line patterns by electron-beam-fabricated templates

Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February 2015. === "September 2014." Cataloged from student-submitted PDF version of thesis. === Includes bibliographical references (pages 54-58). === The doubling of block c...

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Bibliographic Details
Main Author:	Oser, Kameron L
Other Authors:	Karl K. Berggren.
Format:	Others
Language:	English
Published:	Massachusetts Institute of Technology 2016
Subjects:	Electrical Engineering and Computer Science.
Online Access:	http://hdl.handle.net/1721.1/100689

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