Doubling of block copolymer line patterns by electron-beam-fabricated templates
Thesis: M. Eng., Massachusetts Institute of Technology, Department of Electrical Engineering and Computer Science, February 2015. === "September 2014." Cataloged from student-submitted PDF version of thesis. === Includes bibliographical references (pages 54-58). === The doubling of block c...
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| Format: | Others |
| Language: | English |
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Massachusetts Institute of Technology
2016
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| Online Access: | http://hdl.handle.net/1721.1/100689 |