The effects of deposition parameters on hydrogenated amorphous silicon films fabricated by microwave glow discharge techniques

The effects of deposition parameters on hydrogenated amorphous silicon films fabricated by microwave glow discharge techniques

Bibliographic Details
Main Author:	Mejia Zenteno, Sergio Ruperto Tadeo.
Published:	2014
Online Access:	http://hdl.handle.net/1993/28702

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