Effect of stress on silicon oxynitride optical waveguides and devices

Effect of stress on silicon oxynitride optical waveguides and devices

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Integrated demultiplexers and other DWDM components can be fabricated from optical waveguides. In particular, DWDM demultiplexers can be fabricated from silicon oxynitride optical waveguides. Optical attenuation and polarization-dependent propagation are two properties of the optical waveguides that...

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Bibliographic Details
Main Author:	Sun, Yitao
Language:	en_US
Published:	2007
Online Access:	http://hdl.handle.net/1993/2557

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