Precursors for Copper Chemical Vapor Deposition
The main objective of this study was to synthesize precursors that are capable of producing copper films of high quality by chemical vapor deposition (CVD). We investigated some copper(I) and copper(II) complexes as precursors for chemical or photochemical vapor deposition. In chapter 2, we synthesi...
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| Format: | Others |
| Language: | en |
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LSU
2002
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| Online Access: | http://etd.lsu.edu/docs/available/etd-0606102-074339/ |