Development of a Micro Power Relay with Static Electrical Actuator

In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some de...

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Bibliographic Details
Main Author:	Yang, Ren
Other Authors:	Elizabeth J. Podlaha
Format:	Others
Language:	en
Published:	LSU 2002
Subjects:	Mechianical Engineering
Online Access:	http://etd.lsu.edu/docs/available/etd-0408102-211030/

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spelling	ndltd-LSU-oai-etd.lsu.edu-etd-0408102-2110302013-01-07T22:48:00Z Development of a Micro Power Relay with Static Electrical Actuator Yang, Ren Mechianical Engineering In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some design and simulation about a new prototype micro power relay are done. Based on the design, UV-LIGA is used as the fabrication method. The bottom part and top part of the micro power relay are fabricated separately. After assembly the top part on the bottom part, some simple tests about the micro power relay are done. The test results are close to the simulation results. Elizabeth J. Podlaha Su-Seng Pang Wanjun Wang LSU 2002-04-26 text application/pdf http://etd.lsu.edu/docs/available/etd-0408102-211030/ http://etd.lsu.edu/docs/available/etd-0408102-211030/ en unrestricted I hereby grant to LSU or its agents the right to archive and to make available my thesis or dissertation in whole or in part in the University Libraries in all forms of media, now or hereafter known. I retain all proprietary rights, such as patent rights. I also retain the right to use in future works (such as articles or books) all or part of this thesis or dissertation.
collection	NDLTD
language	en
format	Others
sources	NDLTD
topic	Mechianical Engineering
spellingShingle	Mechianical Engineering Yang, Ren Development of a Micro Power Relay with Static Electrical Actuator
description	In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some design and simulation about a new prototype micro power relay are done. Based on the design, UV-LIGA is used as the fabrication method. The bottom part and top part of the micro power relay are fabricated separately. After assembly the top part on the bottom part, some simple tests about the micro power relay are done. The test results are close to the simulation results.
author2	Elizabeth J. Podlaha
author_facet	Elizabeth J. Podlaha Yang, Ren
author	Yang, Ren
author_sort	Yang, Ren
title	Development of a Micro Power Relay with Static Electrical Actuator
title_short	Development of a Micro Power Relay with Static Electrical Actuator
title_full	Development of a Micro Power Relay with Static Electrical Actuator
title_fullStr	Development of a Micro Power Relay with Static Electrical Actuator
title_full_unstemmed	Development of a Micro Power Relay with Static Electrical Actuator
title_sort	development of a micro power relay with static electrical actuator
publisher	LSU
publishDate	2002
url	http://etd.lsu.edu/docs/available/etd-0408102-211030/
work_keys_str_mv	AT yangren developmentofamicropowerrelaywithstaticelectricalactuator
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Development of a Micro Power Relay with Static Electrical Actuator

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