Development of a Micro Power Relay with Static Electrical Actuator
In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some de...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en |
| Published: |
LSU
2002
|
| Subjects: | |
| Online Access: | http://etd.lsu.edu/docs/available/etd-0408102-211030/ |
| Summary: | In this thesis, a research about design and fabrication of a micro power relay is presented. Compared with the traditional electromagnetic relay and solid-state relay, MEMS micro power relay is introduced. After introducing the advantage and other people's research about the MEMS relay, some design and simulation about a new prototype micro power relay are done. Based on the design, UV-LIGA is used as the fabrication method. The bottom part and top part of the micro power relay are fabricated separately. After assembly the top part on the bottom part, some simple tests about the micro power relay are done. The test results are close to the simulation results. |
|---|