Modeling, analysis and testing of an electrostatically actuated waveguide based optical MEMS device for variable optical attenuation

Modeling, analysis and testing of an electrostatically actuated waveguide based optical MEMS device for variable optical attenuation

Electrostatic actuation is a promising solution for Micro Electro Mechanical Systems because of its good scaling properties in small dimensions, high-energy densities and relative ease of fabrication. Its low response time and compatibility with IC technologies make it even more suitable for the opt...

Full description

Bibliographic Details
Main Author: Pendyala, Srinivasa Raghavendra
Format: Others
Published: 2007
Online Access:http://spectrum.library.concordia.ca/975469/1/MR34716.pdf
Pendyala, Srinivasa Raghavendra <http://spectrum.library.concordia.ca/view/creators/Pendyala=3ASrinivasa_Raghavendra=3A=3A.html> (2007) Modeling, analysis and testing of an electrostatically actuated waveguide based optical MEMS device for variable optical attenuation. Masters thesis, Concordia University.

Internet

http://spectrum.library.concordia.ca/975469/1/MR34716.pdf
Pendyala, Srinivasa Raghavendra <http://spectrum.library.concordia.ca/view/creators/Pendyala=3ASrinivasa_Raghavendra=3A=3A.html> (2007) Modeling, analysis and testing of an electrostatically actuated waveguide based optical MEMS device for variable optical attenuation. Masters thesis, Concordia University.

Similar Items