Dynamic analysis and validation of cantilever MEMS subjected to electro-thermo-mechanical influences
Micro-electro-mechanical-systems (MEMS) integrate, by definition, both electrical and mechanical components onto a microscale silicon substrate. Hence, in this regard it is often difficult to differentiate between mechanical and electrical influences on the microsystem. The inclusion of thermal grad...
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2006
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| Online Access: | http://spectrum.library.concordia.ca/8924/1/NR16298.pdf Rinaldi, Gino <http://spectrum.library.concordia.ca/view/creators/Rinaldi=3AGino=3A=3A.html> (2006) Dynamic analysis and validation of cantilever MEMS subjected to electro-thermo-mechanical influences. PhD thesis, Concordia University. |
Internet
http://spectrum.library.concordia.ca/8924/1/NR16298.pdfRinaldi, Gino <http://spectrum.library.concordia.ca/view/creators/Rinaldi=3AGino=3A=3A.html> (2006) Dynamic analysis and validation of cantilever MEMS subjected to electro-thermo-mechanical influences. PhD thesis, Concordia University.