Design and optimization of an AFM probe based on piezoresistance effect

Atomic Force Microscopy (AFM) probes with embedded stress sensors have demonstrated the ability to address key issues such as simplicity, reliability, and responsiveness to parallel scanning techniques and therefore are promising devices for AFM applications. Even though there are some other candida...

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Bibliographic Details
Main Author: Hosseini, Mehran
Format: Others
Published: 2005
Online Access:http://spectrum.library.concordia.ca/8406/1/MR04377.pdf
Hosseini, Mehran <http://spectrum.library.concordia.ca/view/creators/Hosseini=3AMehran=3A=3A.html> (2005) Design and optimization of an AFM probe based on piezoresistance effect. Masters thesis, Concordia University.