Curve veering and a parametric study of stiction in capacitive microelectromechanical systems subjected to electrostatic and Casimir forces

• Main Author: Okwuobi, Azubuike E
• Format: Others
• Published: 2002
• Online Access: http://spectrum.library.concordia.ca/1814/1/MQ72923.pdf; Okwuobi, Azubuike E <http://spectrum.library.concordia.ca/view/creators/Okwuobi=3AAzubuike_E=3A=3A.html> (2002) Curve veering and a parametric study of stiction in capacitive microelectromechanical systems subjected to electrostatic and Casimir forces. Masters thesis, Concordia University.

Curve veering is a phenomenon in which the plot of eigenvalues of a system against a system parameter sometimes results in curves that abruptly veer away from each other in a rapid but continuous manner at points where they are expected to intersect. For certain modes of vibration, the natural frequencies of rectangular plate structures obtained from an exact analysis are expected to intersect. However, approximate analysis would invariably indicate such curves veering away at those points. Occurrence of curve veering indicates the extent of approximation involved and hence it is important to understand this phenomenon from a design perspective. Any error will introduce errors in the response calculations and will result in poor design. In view of their small dimensions such approximations are critical in the estimation of natural frequencies of microelectromechanical systems (MEMS). This phenomenon is investigated for such systems subjected to electrostatic forces and assuming the existence of the Casimir forces. (Abstract shortened by UMI.)