Optical MEMS Switches: Theory, Design, and Fabrication of a New Architecture
The scalability and cost of microelectromechanical systems (MEMS) optical switches are now the important factors driving the development of MEMS optical switches technology. The employment of MEMS in the design and fabrication of optical switches through the use of micromachining fabricated micromir...
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| Format: | Others |
| Language: | en |
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2007
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| Online Access: | http://hdl.handle.net/10012/3116 |