An Automated Micromanipulation System for 3D Parallel Microassembly
The introduction of microassembly technologies has opened up new venues for the fabrication of sophisticated, three-dimensional Microelectromechanical System (MEMS) devices. This thesis presents the development of a robotic micromanipulation system and its controller algorithms for conventional pick...
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| Language: | en_ca |
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2011
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| Online Access: | http://hdl.handle.net/1807/31720 |