FABRICATION AND STUDY OF AC ELECTRO-OSMOTIC MICROPUMPS

FABRICATION AND STUDY OF AC ELECTRO-OSMOTIC MICROPUMPS

In this thesis, microelectrode arrays of micropumps have been designed, fabricated and characterized for transporting microfluid by AC electro-osmosis (ACEO). In particular, the 3D stepped electrode design which shows superior performance to others in literature is adopted for making micropumps, and...

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Bibliographic Details
Main Author: Guo, Xin
Other Authors: Queen's University (Kingston, Ont.). Theses (Queen's University (Kingston, Ont.))
Language:en
en
Published: 2013
Subjects:
microfluidics
PDMS
Kapton
microelectrode
polyimide
SU-8
T-shaped electrodes
HSQ
surface oxide
PolyMUMPs
surface modification
microchannel
electro-osmosis
electrokinetic
MEMS
micropump
microfabrication
bonding
Online Access:http://hdl.handle.net/1974/8025

Internet

http://hdl.handle.net/1974/8025

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