Design, fabrication and characterization of a suspended heterostructure
This thesis presents the design and theoretical modeling of an aluminum gallium arsenide/gallium arsenide heterostructure from which suspended nanoscale mechanical resonators with embedded two-dimensional electron gas (2DEG) can be made. The mechanical characteristics of the resonator and the piezoe...
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| Format: | Others |
| Language: | en en |
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2007
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| Online Access: | http://hdl.handle.net/1974/726 |