DEVELOPMENT OF NOVEL 2 DOF THERMAL MICRO ACTUATORS AND A COMPARISON OF DIFFERENT DISPLACEMENT MEASUREMENT TECHNIQUES
This thesis examines the development and testing of a novel 2 DOF (Degrees of Freedom) thermal actuator using Micro Electro Mechanical Systems (MEMS) technology. A out-of-plane displacement measurement technique based on optical focus adjustments is also implemented and tested. In-plane displacement...
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| Language: | en |
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2011
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| Online Access: | http://hdl.handle.net/10222/14021 |