Magnetic force microscopy imaging of current paths in integrated circuits with overlayers

Magnetic force microscopy imaging of current paths in integrated circuits with overlayers

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Imaging of current in internal conductors through magnetic field detection by magnetic force microscopy (MFM) is of growing interest in the analysis of integrated circuits (ICs). This thesis presents a systematic study of the MFM based mapping of current in model circuits by using force and force gr...

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Bibliographic Details
Main Author: Pu, Anle
Other Authors: Thomson,Douglas (Electrical and Computer Engineering)
Format: Others
Language:en_US
Published: 2007
Subjects:
Magnetic force microscopy
imaging
MFM
current
integrated circuit
mapping
fault location
Online Access:http://hdl.handle.net/1993/2822

Internet

http://hdl.handle.net/1993/2822

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