Investigation of a micromachined electric field mill to maximize the electrostatic field sensitivity

This thesis includes the modification and optimization to an electric field mill based on micromachining technology. The sensor was originally designed to overcome the disadvantages of the conventional macroscopic field mill. Although it achieved all these listed above with a minimum detectable fiel...

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Bibliographic Details
Main Author: Zhou, Yu
Other Authors: Shafai, Cyrus (Electrical and computer engineering)
Published: 2012
Subjects:
Online Access:http://hdl.handle.net/1993/8922