Design & fabrication of corrugated micromachined membranes

Design & fabrication of corrugated micromachined membranes

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Bibliographic Details
Main Author:	Chrusch, Dwayne D.
Published:	2013
Online Access:	http://hdl.handle.net/1993/19862

Design & fabrication of corrugated micromachined membranes

Design & fabrication of corrugated micromachined membranes

by Chrusch, Dwayne D.
Published 2013

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