Ion implantation patterning of high temperature superconducting thin films and multilayers
This thesis was motivated by the suggestion that selectively implanting YBa₂Cu₃0₇ (YBCO) films with a highly reactive ion, such as Si, could pattern without destroying or removing material. If true, this would greatly simplify conventional methods of patterning multilayer structures. This led to...
Main Author: | Wong, Andre Wing Gai |
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Language: | English |
Published: |
2009
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Online Access: | http://hdl.handle.net/2429/9922 |
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