Ion implantation patterning of high temperature superconducting thin films and multilayers

This thesis was motivated by the suggestion that selectively implanting YBa₂Cu₃0₇ (YBCO) films with a highly reactive ion, such as Si, could pattern without destroying or removing material. If true, this would greatly simplify conventional methods of patterning multilayer structures. This led to...

Full description

Bibliographic Details
Main Author: Wong, Andre Wing Gai
Language:English
Published: 2009
Online Access:http://hdl.handle.net/2429/9922

Similar Items