A micromachined inductive sensor using folded flex-circuit structures and its wireless telemetry applications
This thesis reports a flexible, passive wireless inductive sensor with micromachined variable inductors for telemetric applications. The variable inductor is formed by folding coplanar dual spiral coil with 5-10 mm size that are microfabricated using 50-μm-thick copper-clad polyimide film commonl...
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| Language: | English |
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University of British Columbia
2009
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| Online Access: | http://hdl.handle.net/2429/5418 |