Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors

Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors

Bibliographic Details
Main Author:	Pattnaik, Prasant Kumar
Other Authors:	Srinivas, T
Language:	en_US
Published:	2011
Subjects:	Optoelectromechanical Systems Pressure Detectors Vibration Detectors Micro Optoelectromechanical Devices Micro Electromechanical Sensors Integrated Optics Micro-Opto-Electro-Mechanical Systems (MOEMS) MEMS Devices MOEM Pressure Sensor MOEM Vibration Sensor MEMS Pressure Sensor MOEM Sensors Electromechanical Engineering
Online Access:	http://etd.iisc.ernet.in/handle/2005/1414 http://etd.ncsi.iisc.ernet.in/abstracts/1823/G19131-Abs.pdf

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