Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors

Analysis And Design Of Micro-Opto-Electro-Mechanical Systems (MOEMS) Based Pressure And Vibration Sensors

Bibliographic Details
Main Author: Pattnaik, Prasant Kumar
Other Authors: Srinivas, T
Language:en_US
Published: 2011
Subjects:
Optoelectromechanical Systems
Pressure Detectors
Vibration Detectors
Micro Optoelectromechanical Devices
Micro Electromechanical Sensors
Integrated Optics
Micro-Opto-Electro-Mechanical Systems (MOEMS)
MEMS Devices
MOEM Pressure Sensor
MOEM Vibration Sensor
MEMS Pressure Sensor
MOEM Sensors
Electromechanical Engineering
Online Access:http://etd.iisc.ernet.in/handle/2005/1414
http://etd.ncsi.iisc.ernet.in/abstracts/1823/G19131-Abs.pdf

Internet

http://etd.iisc.ernet.in/handle/2005/1414
http://etd.ncsi.iisc.ernet.in/abstracts/1823/G19131-Abs.pdf

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