Modeling and Diagnosis of Excimer Laser Ablation

Modeling and Diagnosis of Excimer Laser Ablation

Recent advances in the miniaturization, functionality, and integration of integrated circuits and packages, such as the system-on-package (SOP) methodology, require increasing use of microvias that generates vertical signal paths in a high-density multilayer substrate. A scanning projection excimer...

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Bibliographic Details
Main Author: Setia, Ronald
Format: Others
Language:en_US
Published: Georgia Institute of Technology 2006
Subjects:
Neural networks
Microvia
Microsystem packaging
Neuro-fuzzy networks
Statistical experimental design
Excimer laser ablation
Failure detection and diagnosis
Genetic algorithms
Dempster-Shafer theory
Neural networks (Computer science)
Excimer lasers
Microelectromechanical systems
Microelectronics
Online Access:http://hdl.handle.net/1853/7634

Internet

http://hdl.handle.net/1853/7634

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