Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope

Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope

Bibliographic Details
Main Author: Ceremuga, Joseph Thomas, II
Format: Others
Language:en_US
Published: Georgia Institute of Technology 2005
Subjects:
Optical data processing
Metrology
Microsocopy
Lithography
Online Access:http://hdl.handle.net/1853/5394
id ndltd-GATECH-oai-smartech.gatech.edu-1853-5394
record_format oai_dc
spelling ndltd-GATECH-oai-smartech.gatech.edu-1853-53942013-01-07T20:11:22ZOptimizing inspection of high aspect ratio microstructure using a programmable optical microscopeCeremuga, Joseph Thomas, IIOptical data processingMetrologyMicrosocopyLithographyGeorgia Institute of Technology2005-03-10T18:40:17Z2005-03-10T18:40:17Z2003-12-01Thesis6403375 bytesapplication/pdfhttp://hdl.handle.net/1853/5394en_US
collection NDLTD
language en_US
format Others
sources NDLTD
topic Optical data processing
Metrology
Microsocopy
Lithography
spellingShingle Optical data processing
Metrology
Microsocopy
Lithography
Ceremuga, Joseph Thomas, II
Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
author Ceremuga, Joseph Thomas, II
author_facet Ceremuga, Joseph Thomas, II
author_sort Ceremuga, Joseph Thomas, II
title Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
title_short Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
title_full Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
title_fullStr Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
title_full_unstemmed Optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
title_sort optimizing inspection of high aspect ratio microstructure using a programmable optical microscope
publisher Georgia Institute of Technology
publishDate 2005
url http://hdl.handle.net/1853/5394
work_keys_str_mv AT ceremugajosephthomasii optimizinginspectionofhighaspectratiomicrostructureusingaprogrammableopticalmicroscope
_version_ 1716474014000480256

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