Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications

Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications

Bibliographic Details
Main Author: Barstow, Sean J.
Format: Others
Language:en_US
Published: Georgia Institute of Technology 2005
Subjects:
Metallic oxides
Semiconductors Materials
Printed circuits Materials
Thin-film circuits Materials
Online Access:http://hdl.handle.net/1853/5385
id ndltd-GATECH-oai-smartech.gatech.edu-1853-5385
record_format oai_dc
spelling ndltd-GATECH-oai-smartech.gatech.edu-1853-53852013-01-07T20:11:22ZUse of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applicationsBarstow, Sean J.Metallic oxidesSemiconductors MaterialsPrinted circuits MaterialsThin-film circuits MaterialsGeorgia Institute of Technology2005-03-10T18:38:15Z2005-03-10T18:38:15Z2003-12-01Dissertation9416623 bytesapplication/pdfhttp://hdl.handle.net/1853/5385en_US
collection NDLTD
language en_US
format Others
sources NDLTD
topic Metallic oxides
Semiconductors Materials
Printed circuits Materials
Thin-film circuits Materials
spellingShingle Metallic oxides
Semiconductors Materials
Printed circuits Materials
Thin-film circuits Materials
Barstow, Sean J.
Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications
author Barstow, Sean J.
author_facet Barstow, Sean J.
author_sort Barstow, Sean J.
title Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications
title_short Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications
title_full Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications
title_fullStr Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications
title_full_unstemmed Use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications
title_sort use of photosensitive metal-organic precursors to deposit metal-oxides for thin-film capacitor applications
publisher Georgia Institute of Technology
publishDate 2005
url http://hdl.handle.net/1853/5385
work_keys_str_mv AT barstowseanj useofphotosensitivemetalorganicprecursorstodepositmetaloxidesforthinfilmcapacitorapplications
_version_ 1716474011036155904

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