Mechanically flexible interconnects (MFIs) for large scale heterogeneous system integration
In this research, wafer-level flexible input/output interconnection technologies, Mechanically Flexible Interconnects (MFIs), have been developed. First, Au-NiW MFIs with 65 µm vertical elastic range of motion are designed and fabricated. The gold passivation layer is experimentally verified to not...
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Language: | en_US |
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Georgia Institute of Technology
2015
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Online Access: | http://hdl.handle.net/1853/53637 |