Influence of frequency and environment on the fatigue behavior of monocrystalline silicon thin films
Understanding the mechanisms for fatigue crack initiation and propagation in micron-scale silicon (Si) is of great importance to assess and improve the reliability of Si based microelectromechanical systems (MEMS) in harsh environments. Accordingly, this investigation studies the fatigue properties...
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Georgia Institute of Technology
2010
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| Online Access: | http://hdl.handle.net/1853/33957 |