Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems

Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems

Bibliographic Details
Main Author: Boyd, Edwin Pressley
Published: Georgia Institute of Technology 2009
Subjects:
Vapor-plating
Organometallic compounds
Online Access:http://hdl.handle.net/1853/27400
id ndltd-GATECH-oai-smartech.gatech.edu-1853-27400
record_format oai_dc
spelling ndltd-GATECH-oai-smartech.gatech.edu-1853-274002013-12-15T03:42:13ZPreparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systemsBoyd, Edwin PressleyVapor-platingOrganometallic compoundsGeorgia Institute of Technology2009-03-26T13:53:15Z2009-03-26T13:53:15Z1989-12Thesis330717http://hdl.handle.net/1853/27400Access restricted to authorized Georgia Tech users only.
collection NDLTD
sources NDLTD
topic Vapor-plating
Organometallic compounds
spellingShingle Vapor-plating
Organometallic compounds
Boyd, Edwin Pressley
Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
author Boyd, Edwin Pressley
author_facet Boyd, Edwin Pressley
author_sort Boyd, Edwin Pressley
title Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
title_short Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
title_full Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
title_fullStr Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
title_full_unstemmed Preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
title_sort preparation of volatile metalorganic compounds for use in metalorganic chemical vapor deposition systems
publisher Georgia Institute of Technology
publishDate 2009
url http://hdl.handle.net/1853/27400
work_keys_str_mv AT boydedwinpressley preparationofvolatilemetalorganiccompoundsforuseinmetalorganicchemicalvapordepositionsystems
_version_ 1716619569005592576

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