An electromagnetically actuated rotary gate microvalve with bistability
Two types of rotary gate microvalves are developed for flow modulation in a microfluidic system that operates at high flow rate and/or uses particulate flow. This research work encompasses design, microfabrication, and experimental evaluation of these microvalves in three distinct areas compliant...
| Main Author: | |
|---|---|
| Published: |
Georgia Institute of Technology
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/1853/22576 |