Single-crystal silicon HARPSS capacitive beam resonators

Single-crystal silicon HARPSS capacitive beam resonators

Bibliographic Details
Main Author:	Hashimura, Akinori
Published:	Georgia Institute of Technology 2007
Subjects:	Silicon crystals Electric properties Microelectromechanical systems Integrated circuits Design and construction Resonators
Online Access:	http://hdl.handle.net/1853/15798

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