A method of determining the high frequency dielectric properties of thin films using in-situ structures

A method of determining the high frequency dielectric properties of thin films using in-situ structures

Bibliographic Details
Main Author:	Laursen, Kirk Garrett
Format:	Others
Language:	en_US
Published:	Georgia Institute of Technology 2007
Subjects:	Dielectrics Electronic circuits Thin films
Online Access:	http://hdl.handle.net/1853/13844

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