Alternatives Antriebs-und Auswerteverfahren für die Mikrosystemtechnik

Alternatives Antriebs-und Auswerteverfahren für die Mikrosystemtechnik

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In this paper the development, the fabrication and the experimental characterisation of a novel electrodynamic-driven micro-actuator for in plane motions and a novel vertical field effect transistor (vertical FET) is presented. The micro-actuator for motion is based on the Lorentz force generated b...

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Bibliographic Details
Main Author: Buschnakowski, Stephan
Other Authors: TU Chemnitz, Fakultät für Elektrotechnik und Informationstechnik
Format: Doctoral Thesis
Language:deu
Published: Universitätsbibliothek Chemnitz 2004
Subjects:
Aktoren
Arrays
Bewegungsdetektion
Mikromanipulation
Sensoren
ddc:620
Feldeffekt
Mikromechanik
Simulation
Online Access:http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401542
http://nbn-resolving.de/urn:nbn:de:swb:ch1-200401542
http://www.qucosa.de/fileadmin/data/qucosa/documents/4897/data/diss.pdf
http://www.qucosa.de/fileadmin/data/qucosa/documents/4897/20040154.txt
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