Charakterisierung von a-Si:H/c-Si-Heterokontakten und dünnen Schichten aus hydrogenisiertem amorphem Silizium, hergestellt mittels gepulstem DC-Magnetronsputtern

Charakterisierung von a-Si:H/c-Si-Heterokontakten und dünnen Schichten aus hydrogenisiertem amorphem Silizium, hergestellt mittels gepulstem DC-Magnetronsputtern

Dünne Schichten aus hydrogenisiertem amorphem Silizium a-Si:H spielen für die Photovoltaik eine wichtige Rolle. Einerseits kommt für die Dünnschicht-Photovoltaik unterschiedlich dotiertes a-Si:H in den Schichten einer p-i-n-Solarzelle zur Anwendung, andererseits stellen Heterokontakt-Solarzellen aus...

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Bibliographic Details
Main Author:	Nobis, Frank
Other Authors:	TU Chemnitz, Fakultät für Naturwissenschaften
Format:	Doctoral Thesis
Language:	deu
Published:	Universitätsbibliothek Chemnitz 2013
Subjects:	hydrogenisiertes amorphes Silizium a-Si:H gepulstes DC-Magnetronsputtern Heterokontakt multi-tunneling capture-emission MTCE Diode Diodenidealitätsfaktor Aktivierungsenergie Ionenbeschuss Dotiereffizienz hydrogenated amorphous Silicon a-Si:H pulsed DC magnetron sputtering heterojunction diode diode ideality factor activation energy ion bombardment doping efficiency ddc:530 Magnetronsputtern Silicium Heteroübergang Halbleiter Elektrische Messung
Online Access:	http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-127840 http://nbn-resolving.de/urn:nbn:de:bsz:ch1-qucosa-127840 http://www.qucosa.de/fileadmin/data/qucosa/documents/12784/Dissertation_Frank_Nobis.pdf http://www.qucosa.de/fileadmin/data/qucosa/documents/12784/signatur.txt.asc

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